C00322 - SEMI C3.22 - Standard for Oxygen (O2), 99.5% Quality StdPbc-1224 This Document covers requirements for

This Document covers requirements for carbon dioxide (CO2) that is used in the semiconductor industry

1  This Standard is written to provide better communication between parties in the supply chain

and wafer to wafer stacking

This edition was approved for publication by the global Audits & Reviews Subcommittee on May 13

and broken beads content

C00322 - SEMI C3.22 - Standard for Oxygen (O2), 99.5% Quality StdPbc-1224 This Document covers requirements forThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on July 11, 2004. Available at www. semi. org in November 2004; originally published in 1983; previously published in 1993. NOTICE: This Document was balloted and approved for withdrawal in 2004. Oxygen is a colorless, odorless and oxidizing gas. It supports combustion. Referenced SEMI